(a) Schematic of the laser direct-writing system. (b) Vertical view of the cantilever of the SNOM tip. (c) Details of the pyramid tip structure and three-dimensional (3D) multiphysics model in the ...
EUV, extreme ultraviolet lithography, is nearly completely associated with the Dutch company ASML, the only maker of EUV machines that are used by TSMC, Intel and other chip manufacturers of advanced ...
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