Optical lithography is employed in manufacturing integrated circuits. It starts with attaching a photosensitive material—or photoresist—to the substrate. A photomask with the required pattern is ...

Fig. 1 The lithography process. The projection lithography system. The advancement of semiconductor manufacturing is a key driver of electronic device innovations. As Moore’s Law progresses, ...

There is a new type of EUV lithography using only four reflective mirrors overturns conventional technology and will contribute to advanced semiconductors at 7nm and below. Professor Tsumoru Shintake ...