Numerical Technologies is trying to take its phase-shift mask technology out of just making shorter gates and into the interconnect layers of chips as the chipmakers try to push 193nm equipment deeper ...
SAN JOSE — Numerical Technologies Inc. today announced a new software module to enable IC manufacturers and photomask shops to quickly inspect and determine the quality of attenuated phase-shift masks ...
New research paper titled “Attenuated phase shift masks: a wild card resolution enhancement for extreme ultraviolet lithography?,” from researchers at Fraunhofer-Institut für Integrierte Systeme und ...
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