A technical paper titled “Improved Defect Detection and Classification Method for Advanced IC Nodes by Using Slicing Aided Hyper Inference with Refinement Strategy” was published by researchers at ...
How Does EUV Lithography Work? EUV Lithography is a state-of-the-art technology in chip manufacturing that uses highly energetic ultraviolet light to carve detailed patterns onto semiconductor ...
In the realm of science and technology, harnessing coherent light sources in the deep ultraviolet (DUV) region holds immense significance across various applications such as lithography, defect ...
As technology nodes shrink, end users are designing systems where each chip element is being targeted for a specific technology and manufacturing node. While designing chip functionality to address ...
A distinguished expert in AI-driven computational lithography and advanced metrology, Botlagunta Preethish Nandan has recently come up with a new approach to elevate the precision and efficiency of ...
The Applied UVision 3 system from Applied Materials is a deep ultraviolet (DUV) brightfield wafer-inspection tool that offers the sensitivity necessary for 45-nm front end of line (FEOL) and immersion ...