a Fabrication process: (i) a-Si:H is deposited onto silica (SiO2) via plasma-enhanced chemical vapor deposition (PECVD). (ii) The film is patterned using electron-beam lithography, followed by Cr ...
Thermo-optic modulation in silicon photonic devices exploits the strong dependence of silicon’s refractive index on temperature to achieve controlled phase shifts in integrated optical circuits. By ...